发明名称 Method for forming an acoustic mirror with reduced metal layer roughness and related structure
摘要 According to an exemplary embodiment, a method of forming a metal layer having reduced roughness includes a step of forming a seed layer over a dielectric layer. The method further includes a step of forming the metal layer over the seed layer. The seed layer causes a top surface of the metal layer to have reduced roughness. The seed layer and the metal layer can be formed in a same process chamber or in different process chambers. The dielectric layer, the seed layer, and the metal layer having reduced roughness can be utilized in an acoustic mirror structure.
申请公布号 US2009017326(A1) 申请公布日期 2009.01.15
申请号 US20080215950 申请日期 2008.07.01
申请人 SKYWORKS SOLUTIONS, INC. 发明人 BARBER BRADLEY P.;GEHLERT PAUL P.;SHEPARD CHRISTOPHER F.
分类号 B32B15/00;B05D1/36;B32B5/00;C23C16/06 主分类号 B32B15/00
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