发明名称 Field Effect Transistors Having Protruded Active Regions and Methods of Fabricating Such Transistors
摘要 Provided are a field effect transistor, a method of manufacturing the same, and an electronic device including the field effect transistor. The field effect transistor may have a structure in which a double gate field effect transistor and a recess channel array transistor are formed in a single transistor in order to improve a short channel effect which occurs as field effect transistors become more highly integrated, a method of manufacturing the same, and an electronic device including the field effect transistor. The field effect transistor can exhibit stable device characteristics even when more highly integrated in such a manner that both the length and width of a channel increase and particularly the channel can be significantly long, and can be manufactured simply.
申请公布号 US2009014786(A1) 申请公布日期 2009.01.15
申请号 US20080170537 申请日期 2008.07.10
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE JI-YOUNG;SEO JUN
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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