CLOSURE MECHANISM FOR PRESSURE TEST CHAMBERS FOR TESTING ELECTRONIC COMPONENTS, IN PARTICULAR ICS

摘要

A closure mechanism for pressure test chambers for testing electronic components, in particular ICs, has a plurality of pivoting jaws (11). At least some of the pivoting jaws (11) have at least one lifting apparatus (15) which can be advanced to two interacting cavity elements (1, 2), which surround a cavity (5), by means of the pivoting jaws (11). Furthermore, at least some of the pivoting jaws (11) have at least one locking device (23) in order to move spacer elements into an intermediate space (25) between the associated pivoting jaws (11) and the compressed cavity element (1), as a result of which the tightness of the cavity (5) is maintained even when the lifting apparatuses (15) are retracted.