LID BODY FOR SUBSTRATE CONTAINER AND SUBSTRATE CONTAINER

摘要

Provided are a lid body for a substrate container, which has a locking mechanism placed in a narrow space in the lid body and with the use of which the construction of a lid body opening/closing device is simplified, and a substrate container. A substrate container has a container body for receiving and arranging a small number of semiconductor wafers and also has a lid body (30) formed in a horizontally long shape in a front view and opening and closing an opened front face section of the container body. The lid body (30) incorporates a locking mechanism (60) for locking the lid body when it is fitted in the front face section of the container body. The locking mechanism (60) is made up of a pair of advancing/receding locking bodies (61) supported by the lid body (30) and facing opposite sides of the inner periphery of the front face section of the container body when the lid body (30) is fitted in the front face section, and of a pair of coil springs (62) for causing, when the lid body (30) is fitted in the front face section of the container body, the pair of advancing/receding locking bodies (61) to advance from the lid body (30) to the opposite sides of the inner periphery of the front face section to make the front ends of the pair of advancing/receding locking bodies (61) come into contact and interfere with the inner periphery. Because the small-sized locking mechanism (60) is horizontally placed in the horizontally long lid body (30), the locking mechanism (60) can be appropriately installed in the narrow space of the lid body (30).