METHOD FOR MANUFACTURING PIEZO-ELECTRIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezo-electric device in which expansion and contraction due to a change in temperature is sufficiently suppressed. SOLUTION: A piezo-electric substrate 1 is mainly includes a base material 11, and a film 12 formed on one main surface of the base material 11. In the base material 11, the main surface on which the film 12 is formed is a roughened main surface 11a. The piezo-electric substrate 1 is obtained by forming the film 12 made from a material with a coefficient of linear expansion smaller than the coefficient of linear expansion of the base material 11 on the roughened main surface 11a using a thermal spraying method. COPYRIGHT: (C)2009,JPO&INPIT