| 摘要 |
PROBLEM TO BE SOLVED: To provide a linear absolute displacement sensor which is high in resolution and has long stroke capable of detecting correct displacement of the testing body after power failure, and moreover, which will not make the configuration complex. SOLUTION: The linear absolute displacement sensor 5 detecting the linear absolute displacement, based on the pitch information and minute displacement information in the pitch comprises a first sensor 6 for outputting the output of the first sensor; a second sensor 7 for outputting the output of the second sensor which is the same form as the output of the first sensor; a switching part 8 for outputting either of the first sensor output and the second sensor output as the selected output; and a processing part 9 for specifying the pitch of the inspection object, when the second sensor 7 is selected from the sensor output, and specifying the minute displacement, when the first sensor 6 is selected and furthermore holding the specified pitch and the minute displacement information. The second sensor 7 is selected accompanying the turning on of the power source, then the first sensor 6 is selected. COPYRIGHT: (C)2009,JPO&INPIT
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