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发明名称
APPARATUS FOR ARRANGING VERY SMALL METALLIC BALL
摘要
申请公布号
JPH0469945(A)
申请公布日期
1992.03.05
申请号
JP19900183645
申请日期
1990.07.10
申请人
NIPPON STEEL CORP
发明人
MARUYAMA TADAKATSU;UNO TOMOHIRO;SUZUKI YASUHIRO;ONO TAKAHIDE
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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