CMP METHOD FOR COPPER-CONTAINING SUBSTRATES,申请号EP20070753728-传众专利搜索

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发明名称	CMP METHOD FOR COPPER-CONTAINING SUBSTRATES
摘要
申请公布号	EP2013308(A1)	申请公布日期	2009.01.14
申请号	EP20070753728	申请日期	2007.03.22
申请人	CABOT MICROELECTRONICS CORPORATION	发明人	ZHANG, JIAN;CARTER, PHILLIP;LI, SHOUTIAN
分类号	C09K3/14;C09G1/02;H01L21/321	主分类号	C09K3/14
代理机构		代理人
主权项
地址

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