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申请公布号
JP4209057(B2)
申请公布日期
2009.01.14
申请号
JP19990341916
申请日期
1999.12.01
申请人
发明人
分类号
H01L21/302;H05B3/74;C23C16/00;C23C16/458;C23F1/00;H01L21/00;H01L21/02;H01L21/205;H01L21/306;H01L21/3065;H05B3/20
主分类号
H01L21/302
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