| 发明名称 |
SYSTEM AND METHOD FOR TRANSPORT |
| 摘要 |
<p>A deposition system and method includes a deposition source, a roll conveyor and at least one shield positioned at a location proximate to the deposition source.</p> |
| 申请公布号 |
EP2013375(A2) |
申请公布日期 |
2009.01.14 |
| 申请号 |
EP20070754376 |
申请日期 |
2007.03.29 |
| 申请人 |
FIRST SOLAR INC. |
发明人 |
POWELL, RICKY, CHARLES |
| 分类号 |
C23C16/00;C03B35/16;C23C16/54;H01L21/677 |
主分类号 |
C23C16/00 |
| 代理机构 |
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| 地址 |
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