| 摘要 |
An optical camera 5 for photographing a fluoroscopy object W on a sample stage 3 is provided. Prior to a fluoroscopic operation, the sample stage 3 is driven, and the fluoroscopy object W is photographed in a plurality of postures by the optical camera 5, and optical images are stored in a storage device 14. Among the optical images stored in the storage device 14, an optical image O that is closest to an image of the fluoroscopy object W viewed from the fluoroscopy direction at current time is selected and displayed on a display 13 during the fluoroscopic operation. This enables intuitive grasping of the fluoroscopy direction, and intuitive grasping of the fluoroscopy position is also enabled by superimposing and displaying a marker M, which represents a position of an X-ray optical axis L, in addition to the optical image O.
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