METHOD OF MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE,申请号KR20020046498-传众专利搜索

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发明名称	METHOD OF MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号	KR100878384(B1)	申请公布日期	2009.01.13
申请号	KR20020046498	申请日期	2002.08.07
申请人		发明人
分类号	H01L29/772;C23C16/18;H01L21/02;H01L21/285;H01L21/3205;H01L21/768;H01L21/8238;H01L21/8242;H01L27/092;H01L27/108	主分类号	H01L29/772
代理机构		代理人
主权项
地址

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