| 发明名称 |
Method for the metalization of an insulator and/or a dielectric |
| 摘要 |
The invention relates to a process for the metallization of an insulator and/or a dielectric, wherein the insulator is firstly activated, it is subsequently coated with another insulator and the latter is patterned, then the first is seeded and lastly metallized.
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| 申请公布号 |
US7476412(B2) |
申请公布日期 |
2009.01.13 |
| 申请号 |
US20010817963 |
申请日期 |
2001.03.27 |
| 申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
LOWACK KLAUS;SCHMID GUENTER;SEZI RECAI |
| 分类号 |
B05D5/12;C23C18/16;C23C18/30;G03F7/00;H01L21/00;H05K3/18;H05K3/46 |
主分类号 |
B05D5/12 |
| 代理机构 |
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