| 摘要 |
<p>A stage apparatus, an exposure apparatus, and a method for manufacturing a device are provided to restrain the generation of heat by the tremor linear motor by controlling the moment of electromagnet. A stage apparatus comprises a first stage(104) and a second stage(105) located on the first stage. The location of the second stage about the first stage is settled by a linear motor(103). The second stage speeds up and down by a plurality of electromagnets(106a,106b,106c,106d). The plural electromagnets are controlled by the rotation of the second stage In order to reduce the moment generated from the electromagnet.</p> |
