发明名称 Method for fabricating semiconductor component with thinned substrate having pin contacts
摘要 A semiconductor component includes back side pin contacts fabricated using a circuit side fabrication method. The component also includes a thinned semiconductor die having a pattern of die contacts, and conductive members formed by filled openings in the die contacts and the die. In addition, the pin contacts are formed by terminal portions of the conductive members. The fabrication method includes the steps of forming the openings and the conductive members, and then thinning and etching the die to form the pin contacts. An alternate embodiment female component includes female conductive members configured to physically and electrically engage pin contacts on a mating component of a stacked assembly.
申请公布号 US7473582(B2) 申请公布日期 2009.01.06
申请号 US20060371766 申请日期 2006.03.09
申请人 MICRON TECHNOLOGY, INC. 发明人 WOOD ALAN G.;DOAN TRUNG TRI
分类号 H01L21/48;H01L23/48;H01L25/065 主分类号 H01L21/48
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