发明名称 Automated yield analysis system
摘要 Systems and methods associated with automated semiconductor fabrication device yield analysis are described. One embodiment includes a computing system that includes a working file storage system that stores files corresponding to semiconductor fabrication test devices. The working file storage system may include working directories and executable flows corresponding to working directories. The computing system also includes a data controller that may select a working directory, transfer an input file to the selected working directory, and execute a flow to process an input file and to produce an output file. The output file may include a yield analysis based on data provided by a semiconductor fabrication test device.
申请公布号 US2009006436(A1) 申请公布日期 2009.01.01
申请号 US20070824436 申请日期 2007.06.29
申请人 发明人 ALQUDAH YAZAN A.;HAJJ HAZEM;ABDELMONEUM MOHAMED;NEIRYNCK JAN M.
分类号 G06F17/30;G06F12/00 主分类号 G06F17/30
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