摘要 |
An image sensor is disclosed that can provide a microlens aligned directly above an active area of a substrate. The image sensor can include a substrate having a pixel area. An active region can be formed on the pixel area and can include photodiodes. Metal lines and an interlayer dielectric can be provided on the pixel area of the substrate. A microlens can be formed above the metal lines and interlayer dielectric to be directly aligned with the active area of the pixel area. To achieve such an alignment, an alignment key of the microlens can be aligned with an alignment key of the active region. In one embodiment, the microlens can avoid being formed right above the metal lines.
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