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发明名称
电浆处理装置及防着构件之制造方法
摘要
本发明之电浆处理装置系在被处理基板上施行贵金属材料及铁电材料之电浆处理,且包含一面被加热,一面曝露于电浆中之构成构件之装置,前述构成构件系以铝纯度99%以上之铝合金形成。
申请公布号
TW200901314
申请公布日期
2009.01.01
申请号
TW097118227
申请日期
2008.05.16
申请人
爱发科股份有限公司
发明人
小风丰;植田昌久;远藤光广;邹红红;宫崎俊也;酒田现示;中村敏幸
分类号
H01L21/3065(2006.01)
主分类号
H01L21/3065(2006.01)
代理机构
代理人
陈长文
主权项
地址
日本
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