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发明名称
基板处理装置及基板处理方法
摘要
本发明之基板处理装置系具有索引器区块及处理区块。复数之表面洗净单元系上下地层合配置于处理区块之一侧面侧上,复数之背面洗净单元系上下地层合配置于处理区块之另一侧面侧上。在索引器区块与处理区块之间,上下地设有用于反转基板W的反转单元。例如,反转单元系用于将由背面洗净单元所进行之背面洗净处理前之基板进行反转等,反转单元系用于将由表面洗净单元所进行之表面洗净处理后之基板W进行载置等。
申请公布号
TW200901357
申请公布日期
2009.01.01
申请号
TW096150474
申请日期
2007.12.27
申请人
大日本斯克琳制造股份有限公司
发明人
光吉一郎;涉川润;清川信治;榑林知启
分类号
H01L21/677(2006.01);H01L21/67(2006.01);H01L21/30(2006.01)
主分类号
H01L21/677(2006.01)
代理机构
代理人
赖经臣;宿希成
主权项
地址
日本
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