发明名称 CONDITION ASSESSMENT SYSTEM FOR A STRUCTURE INCLUDING A SEMICONDUCTOR MATERIAL
摘要 An improved condition testing system and method includes a structure including a semiconductor material with a target portion and a second portion. The target portion has a first feature when at least one of the following occurs: an external force is received by the second portion of the structure and an internal condition occurs in the target portion. The system and method further has a grating shaped and located to produce a first optical interference pattern when the target portion and the grating are exposed to non-invasive illumination and when the target portion has the first feature. Further implementations use a second grating spaced apart from the first grating.
申请公布号 US2009002717(A1) 申请公布日期 2009.01.01
申请号 US20080172629 申请日期 2008.07.14
申请人 ATTOFEMTO, INC. 发明人 PFAFF PAUL
分类号 G01B9/02;G01R31/311 主分类号 G01B9/02
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