发明名称 METHODS OF ETCHING ARTICLES VIA MICROCONTACT PRINTING
摘要 Improved methods of forming a patterned self-assembled monolayer on a surface and derivative articles are provided. According to one method, an elastomeric stamp is deformed during and/or prior to using the stamp to print a self-assembled molecular monolayer on a surface. According to another method, during monolayer printing the surface is contacted with a liquid that is immiscible with the molecular monolayer-forming species to effect controlled reactive spreading of the monolayer on the surface. Methods of printing self-assembled molecular monolayers on nonplanar surfaces and derivative articles are provided, as are methods of etching surfaces patterned with self-assembled monolayers, including methods of etching silicon. Optical elements including flexible diffraction gratings, mirrors, and lenses are provided, as are methods for forming optical devices and other articles using lithographic molding. A method for controlling the shape of a liquid on the surface of an article is provided, involving applying the liquid to a self-assembled monolayer on the surface, and controlling the electrical potential of the surface.
申请公布号 US2009001049(A1) 申请公布日期 2009.01.01
申请号 US20080187070 申请日期 2008.08.06
申请人 PRESIDENT AND FELLOWS OF HARVARD COLLEGE 发明人 WHITESIDES GEORGE M.;XIA YOUNAN;WILBUR JAMES L.;JACKMAN REBECCA J.;KIM ENOCH;PRENTISS MARA G.;MRKSICH MILAN;KUMAR AMIT;GORMAN CHRISTOPHER B.;BIEBUYCK HANS;BERGGREN KARL K.
分类号 C03C15/00;B01L3/00;B05D1/28;C40B60/14;G02B5/18;G02B6/12;G02B6/124;G02B6/136;G02B6/36;G03F7/00;G03F7/16;H01L21/48;H01L21/768 主分类号 C03C15/00
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