Micro-electro-mechanical systems and photonic interconnects employing the same

摘要

Various embodiments of the present invention are directed to micro-electro-mechanical systems and photonic interconnects employing micro-electro-mechanical systems. One micro-electro-mechanical system embodiment of the present invention includes a lens structure and an actuator. The lens structure includes a substantially transparent membrane having a flexible, curved surface, and a reservoir holding fluid that is fluidly coupled to the membrane. The actuator system is operably coupled to the reservoir in order to exert pressure on the fluid to change the curvature of the membrane and the focal point of the lens structure.