JOHNSEN-RAHBEK ELECTROSTATIC CHUCK DRIVEN WITH AC VOLTAGE

摘要

An electrostatic chuck includes dielectric layer having at least one region, an electrode associated with the at least one region, and an AC power source configured to provide an AC voltage signal to the electrode. The dielectric property of the dielectric layer is configured to permit a charge migration about the dielectric layer to produce an electrostatic force to attract a workpiece to the dielectric layer when the AC voltage signal is applied to the electrode. ® KIPO & WIPO 2009