| 摘要 |
The device has an excitation unit i.e. excitation electrode (14), exciting a beam type resonator (10). A detection unit comprises a suspended beam type strain gauge (11) made of piezo-resistive material, where the strain gauge includes a common plane with the resonator. The beam type strain gauge is connected to the resonator at a point that is situated outside of embedded portions (12, 13) to increase the stress observed by the beam type strain gauge. The beam type strain gauge comprises two parallel arms, where the resistive gauge is a silicon nanowire. |
