MATERIAL OF THE RESIST-PROTECTING MEMBRANE FOR IMMERSION LITHOGRAPHY

摘要

To provide a resist protective film material for immersion lithography. An alkali soluble resist protective film material for immersion lithography, which comprises a polymer (F) containing repeating units (F U ) formed by polymerizing a polymerizable compound (f m ) having a fluorine-containing bridged cyclic structure. For example, repeating units (F U ) are repeating units formed by polymerizing a compound (f) selected from the group consisting of the following formulae (f1) to (f4) (R F represents H, F, a C 1-3 alkyl group or a C 1-3 fluoroalkyl group, and X F represents F, OH or CH 2 OH.)