Apparatus and method for grinding workpiece

摘要

An apparatus (2) and method for grinding a workpiece (W) by rotating the workpiece (W) about a rotational axis (C), rotating a cylindrical grinding wheel (30) about a rotational axis being parallel to the rotational axis (C) of the workpiece (W), moving the grinding wheel (30) relative to the workpiece (W) at least in one of a first direction (X) being perpendicular to the rotational axis (C) of the workpiece (W) for grinding the workpiece (W) at a cylindrical surface of the grinding wheel (30) and a second direction (Z) being parallel to the rotational axis (C) of the workpiece (W) for grinding the workpiece (W) at an end surface of the grinding wheel (30) being perpendicular to the rotational axis of the grinding wheel (30), and by superimposing a vibration signal including a plurality of frequency components to a driving signal outputted to one of a workpiece rotating means (21) for rotating the workpiece (W) and a grinding wheel rotating means (24) for rotating the grinding wheel (30).