发明名称 Semiconductor component comprising a buried mirror
摘要 A method for forming a buried mirror in a semiconductor component includes the steps of forming a structure comprising a semiconductor layer laid on an insulating layer covering a substrate; forming one or several openings in the semiconductor layer emerging at the surface of the insulating layer; eliminating a portion of the insulating layer, whereby a recess is formed; forming a second thin insulating layer against the wall of the recess; and forming a metal layer in the recess against the second insulating layer.
申请公布号 US7470559(B2) 申请公布日期 2008.12.30
申请号 US20050297973 申请日期 2005.12.08
申请人 STMICROELECTRONICS SA;STMICROELECTRONICS (CANADA) INC. 发明人 JOUAN SEBASTIEN;MARTY MICHEL
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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