PLASMA NOZZLE ARRAY FOR GENERATING HOMOGENOUS EXPANDING MICROWAVE PLASMA

摘要

FIELD: physics. ^ SUBSTANCE: present invention pertains to microwave systems with nozzle arrays and methods of configuring microwave plasma nozzle arrays. Microwaves are transmitted to a microwave resonator using a special method and form an interference pattern, which comprises high-energy regions in the microwave resonator. The high-energy regions are controlled by the phase and wavelength of the microwaves. The set of nozzle elements is in form of an array. Each of the nozzle elements has a section, partially located in the microwave resonator, taking in gas and passing it through. The nozzle elements receive the energy of the microwaves from one of the high-energy regions. Each of the nozzle elements comprises a rod-shaped conductor on which microwaves are focused. ^ EFFECT: plasma is generated using the incoming gas. ^ 82 cl, 15 dwg