DEFECT REPAIRING DEVICE, DEFECT REPAIRING METHOD, PROGRAM AND COMPUTER READABLE RECORDING MEDIUM

摘要

A defect repairing device (1) capable of repairing defects efficiently comprises a substrate mount (3) for securing a conveyed substrate, a plurality of droplet ejection units (11) disposed along a direction different from the conveyance direction of the substrate when viewed from a direction perpendicular to the substrate secured by the substrate mount (3) and ejecting droplets to defects spotted on the substrate, a head gantry unit (7) mounting the plurality of droplet ejection units (11), and a gantry slide mechanism (4) for moving the head gantry unit (7) relatively along the conveyance direction of substrate at a constant speed, wherein each droplet ejection unit (11) moves independently of each other along a direction different from the conveyance direction depending on data indicative of the positions of a plurality of defects spotted on the substrate while the head gantry unit (7) is moving along the conveyance direction of substrate. ® KIPO & WIPO 2009