| 摘要 |
A unit for supplying liquid and an apparatus for processing a substrate including the same are provided to generate a Venturi effect at an area where liquid recovery and circulation lines are met in order to recollect the liquid used in a processing unit from the liquid recovery line to the liquid circulation line easily. A unit(100) for supplying liquid comprises a liquid storage tank(130), a liquid circulation line(150), a liquid supply line(120), and a liquid recovery line(160). The liquid supply line supplies the liquid from the circulation line into a processing unit(200). The liquid recovery line, connecting the processing unit with the liquid circulation line, returns the liquid used in the processing unit to the liquid circulation line, using a Venturi effect. A drain line(180) is connected with the liquid recovery line to discharge the liquid used in the processing unit. Valves(125,185) flow the liquid to the liquid circulation line or the drain line.
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