RECYCLE AND REUSE OF SILANE

摘要

Methods and apparatus for recovering and recycling silane and silane/hydrogen mixtures used in making thin film solar cells by plasma-enhanced chemical vapor deposition are described. By collecting unreacted silane or silane-hydrogen mixtures from the deposition chambers and recycling the collected gas to the deposition chambers, utilization of silane can be improved by a factor of 2 to 5.