| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum evacuating method, which can shorten a vacuum evacuation time without causing any deficiency caused by moisture. SOLUTION: In a vacuum treatment apparatus 10 equipped with a chamber 11, in the case of a vacuum evacuation in the chamber 11, a pressure in the chamber 11 is maintained to be 6.7 to 13.3×10<SP>2</SP>Pa (5 to 10 Torr) for a fixed time duration, for example, over several ten seconds duration by means of an APC valve 16 (pressure maintenance), and subsequently the pressure in the chamber 11 is rapidly raised to 1.3 to 2.7×10<SP>4</SP>Pa (100 to 200 Torr) by rapidly introducing a heating gas in the chamber 11 (rapid pressure rising). The pressure maintenance and the rapid pressure rising are repeated plural times during a time duration from a time T1 to a time T2. COPYRIGHT: (C)2009,JPO&INPIT
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