| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent degradation in yield and operation rates because of human error, by preventing human error in setting parameters by personnel when designing a mark for detecting position. <P>SOLUTION: A mark designing device designs a mark which is formed on a substrate and is detected by a position detecting device. It includes a means for editing parameters including kind of mark and width and number of lines constituting the mark, a means for forming an image of the mark determined by the parameters, and a display means which displays elements for editing the parameters and an image of the mark thus formed by GUI on a single screen. <P>COPYRIGHT: (C)2009,JPO&INPIT |
