发明名称 |
ELECTRODE AND INTERCONNECT MATERIALS FOR MEMS INTERFEROMETRIC MODULATORS |
摘要 |
A microelectromechanical (MEMS) device is presented which comprises a metallized semiconductor. The metallized semiconductor can be used for conductor applications because of its low resistivity, and for transistor applications because of its semiconductor properties. In addition, the metallized semiconductor can be tuned to have optical properties which allow it to be useful for optical MEMS devices. |
申请公布号 |
WO2008054520(A3) |
申请公布日期 |
2008.12.18 |
申请号 |
WO2007US10166 |
申请日期 |
2007.04.25 |
申请人 |
QUALCOMM MEMS TECHNOLOGIES, INC.;XU, GANG;GOUSEV, EVGENI |
发明人 |
XU, GANG;GOUSEV, EVGENI |
分类号 |
B81C1/00;G02B26/00 |
主分类号 |
B81C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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