| 摘要 |
PROBLEM TO BE SOLVED: To provide an infrared thickness meter for accurately measuring a thin film, etc. without being affected by interference on a front or rear surface of the film or by molecular orientation. SOLUTION: In this infrared thickness meter, polarized light is inputted into a film at an oblique angle with its surface to measure the thickness of the film based on the attenuation amount of the light owing to absorption. This thickness meter is characterized by being equipped with a molecular orientation detection part 20 for detecting the scatter distribution of the light applied to the surface of the film, an orientation calculation part 42 for calculating an orientation index based on a detection signal outputted from the detection part 20, and a corrective calculation part 43 for correctively calculating the thickness of the film based on the orientation index. COPYRIGHT: (C)2009,JPO&INPIT
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