| 摘要 |
<p>The present invention relates to a probe card used in a semiconductor inspection apparatus, in particular, to a probe card including a probe substrate assembly capable of electrically connecting probes inserted into and connected to a probe substrate with a space transformer wholly and accurately. The present invention provides a probe substrate assembly, which a probe in contact with an inspection target is inserted into and connected to, including: a probe substrate through which plural contact holes vertically penetrate; a reinforcing substrate connected with the probe substrate and having an opening which includes plural contact hole arrays; and a probe alignment substrate connected with the reinforcing substrate and through which the plural contact holes vertically penetrate, wherein one end of the probe is inserted into the contact hole of the probe substrate, the opening of the reinforcing substrate and the contact hole of the probe alignment substrate in sequence.</p> |
