| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sterilizer which can sufficiently sterilize even when dust (stuck matters) such as organic or inorganic substances sticks to the surface of a matter to be treated. <P>SOLUTION: The sterilizer includes a sterilization chamber (23, 53, 54, 62) to house matters 30 to be treated, a plasma generation means (11b, 12, 14) to generate plasma inside the sterilization chamber (23, 53, 54, 62), a steam introduction means (1, 71, 44, 72, 45) to introduce steam, a treatment gas introduction means (33, 61, 41) to introduce treatment gas, and an electromagnetic irradiation means (2a, 43a, 42a, 41a) to irradiate the matters 30 to be treated with electromagnetic waves. The plasma generation means (11b, 12, 14) includes a fist electrode 11b and a second electrode 12 placed inside the sterilization chamber (23, 53, 54, 62) and a pulse power source 14 to apply pulses with 10<SP>-7</SP>to 10<SP>-1</SP>of duty ratio to between the first electrode 11b and the second electrode 12 to generate non-thermal equilibrium plasma between the first electrode 11b and the second electrode 12. <P>COPYRIGHT: (C)2009,JPO&INPIT |
