| 摘要 |
A valve apparatus is provided to reduce the time to heat up the connection shaft and moving body into one body as a first heater is set up inside a valve body and directly sets up with being positioned inside the connection shaft in order to contact to the moving body. A valve apparatus is installed on a conduit connecting a chamber and vacuum pump. The valve apparatus is opened and closed so that the pumping force of the vacuum pump be selectively delivered to the chamber. The valve apparatus comprises a valve body(100), a moving body(200), a drive unit(300), a connection shaft(400), a first heater(500). The valve body has an entrance(110) and exit. The moving body is movably installed within the valve body. The moving body selectively opens and closes entrance. The drive unit is combined in the valve body. The drive unit moves the moving body. The connection shaft connects the drive unit and moving body. The first heater is installed at the connection shaft. The first heater heats up the moving body.
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