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发明名称
VERFAHREN ZUM HERSTELLEN EINES MUSTERS HOHER AUFLOESUNG
摘要
申请公布号
DE2227342(A1)
申请公布日期
1973.01.18
申请号
DE19722227342
申请日期
1972.06.06
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y. (V.ST.A.)
发明人
BROERS, ALEX NIGEL, PURDY STATION;SEDGWICK, THOMAS OLIVER, CROMPOND
分类号
H01L21/00;H01L23/29;H05K3/14;(IPC1-7):G03F1/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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