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发明名称
HANDOTAIHENO KONODORINKAKUSANHOHO
摘要
申请公布号
JPS5121775(A)
申请公布日期
1976.02.21
申请号
JP19740093371
申请日期
1974.08.16
申请人
HITACHI LTD
发明人
MOCHIZUKI YASUHIRO;TSUKUDA KYOSHI;YAGI HIDEYUKI
分类号
H01L21/22;H01L21/316
主分类号
H01L21/22
代理机构
代理人
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