| 发明名称 |
PATTERN INSPECTION DEVICE |
| 摘要 |
PURPOSE:To facilitate visual inspection and improve efficiency by controlling the feed of a mask bed so that the image of the same pattern may be subsquently obtained within the view. |
| 申请公布号 |
JPS5249770(A) |
申请公布日期 |
1977.04.21 |
| 申请号 |
JP19750125414 |
申请日期 |
1975.10.20 |
| 申请人 |
TOKYO SHIBAURA ELECTRIC CO |
发明人 |
MINAMI MASAKATA;SEKIZAWA HIDEKAZU |
| 分类号 |
G01B11/00;G01N21/88;G01N21/956;G03F1/84;H01L21/027;H01L21/302;H01L21/66 |
主分类号 |
G01B11/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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