FORFARANDE FOR ANODOXIDERING AV EN TUNNFILMSANORDNING

摘要

Thin-film resistors and other devices are precision adjusted by a regular, geometric progression of steps. Each step of a binary step anodization pattern for adjusting a resistor to a nominal resistance value is designed to decrease by one-half the percentage deviation in resistance from the nominal value at the end of the preceding step. Successive binary step decreases in the percentage resistance deviation are attained by a series of binary step decreases in the product of anodizing current and anodizing time for each step. The resultant, decreasing rate adjustment pattern tends to render negligible any chance of substantially overshooting the desired nominal value while permitting rapid attainment of the nominal value.