| 摘要 |
PURPOSE:To make it possible to measure the roughness of the surface accurately and objectively by providing a line sensor which receives an optical image which is perpendicular to a linear optical image irradiated on a specimen, and transforming the output into a Fourier series. CONSTITUTION:A light emitting part 3 is constituted by a light source 5, a cylindrical lens 6 in front of the source 5, and a slit 7 in front of the lens 6. The linear optical image (i) is irradiated on a specimen M. A sensor part 4 comprises a light receiving lens 8, and a line sensor 9 which is formed in a linear shape, and receives the image (j) which is perpendicular to the image (i) on the specimen M. The output is inputted to a measuring part and transformed into the Fourier series. The more lustrous and smoother the specimen M, the closer the image becomes a rectangular shape, and the high frequency components of series increases. The quality of the surface can be quantitatively obtained from the power spectrum of the series and the result can be objectively displayed. |
