| 摘要 |
PURPOSE:To increase the speed of measurement by a method wherein a plurality of semiconductor measuring circuits are mounted, and data simultaneously measuring characteristics entering measuring sections corresponding to each circuit for a fixed time are housed up to the next measuring time, selected successively and sent into a characteristic decision circuit. CONSTITUTION:The measuring circuits 1l-1n, 2l-2n simultaneoulsy start the measurement of the characteristics of each semiconductor sent into the measuring sections correspondint to resoective circuit for the measuring time TA, and previously house measured data in registers 3l-3n, 4l-4n corresponding to each circuit. Measured data groups housed are read successively from select circuits 5, 6 at the timing of Tx within the TA time, transmitted to a decision control circuit 7 and forwarded to the decision circuit 8 at the timing of Ty. Accordingly, the measurement and decision assigning time of the characteristics of the semiconductor during a control cycle are utilized effectively, and the speed of measurement is increased. |
