| 摘要 |
PURPOSE:To obtain laser beam output with high peak value and perform highly accurate processing by a method wherein the pulsive exciting energy is supplied to the laser medium between a pair of electrodes and the exciting energy which has smaller peak value than the pulse is supplied to the laser medium while the pulse is not supplied. CONSTITUTION:Medium gas 1 is provided in a laser oscillator 2 and a pair of electrodes 3A and 3B are provided in this oscillator 2 with the medium gas 1 in between. Pulsive exciting energy is supplied to these pair of electrodes 3A and 3B by a source 4 and the medium gas 1 is excited and discharge 5 is generated and a laser beam 8 is outputted via a total reflection mirror 6 and a partially transparent mirror 7. While this pulsive energy is not supplied, the exciting energy which has smaller peak value than the pulsive exciting energy is supplied to the electrodes 3A and 3B by the source 4 and the output intensity at the rising part of the output of the laser beam 8. Then an object to be processed can be processed momentarily and is hardly affected by heat, so that the accuracy of processing can be improved. |
