| 摘要 |
PURPOSE:To obtain a magnetic recording medium which is excellent in wear resistance and corrosion resistance, and also is satisfactory in its magnetic characteristic, by constituting it so that an ion of a specific element having specific kinetic energy is made incident onto a ferromagnetic metallic thin film together with neutral evaporation corpuscles for forming a protective layer. CONSTITUTION:A vapor-deposited tape 8 which has provided a ferro-magnetic metallic thin film of cobalt, etc. on a base material such as a polyester film, etc. is shifted to a take-up roll 10 from a feed roll in a vacuum chamber 1, and also an ion source 5, an evaporation source 3 and an acceleration electrode 6 are operated. Subsequently, on the ferromagnetic metallic thin film, a protective layer is formed by making an ion of an element incident, which is selected from B, C, Al, Si, P, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Ag, Mo, Au or Sm, generated from the ion source 5 together with neutral evaporation corpuscles being a material for forming the protective layer, and accelerated so as to have kinetic energy of 10eV-15keV by the acceleration electrode 6. |
