Inspection of unsintered single layer or multilayer ceramics using a broad area electrical contacting structure.

摘要

An unsintered multilayer ceramic body (20) used in LSI chip manufacture contains paste lines (12, 14, 16, 18) sinterable to metal. Line (14) has a void (28). To electrically test the body, a portion of its base is contacted by a broad area conforming electrode (30) with projecting conducting carbon fibers (34). Electrical contact is made to the fibers by a lead (38) and a metal plate (32) from a controller (40). The top surface of the body is scanned by an electron beam (42), and secondary electron emission (46) is detected by detector (44), and controls a display (50). Other electrodes (30) are described, including one urged to conform with the body by differential gas pressure.