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发明名称
Verfahren zum Herstellen eines Halbleiterstrom-tors durch Abtragen von Halbleitermaterial
摘要
申请公布号
DE1223953(B)
申请公布日期
1966.09.01
申请号
DE1962S077843
申请日期
1962.02.02
申请人
SIEMENS-SCHUCKERTWERKE AKTIENGESELLSCHAFT
发明人
BERNUTH DIPL.-PHYS. GOETZ VON
分类号
B24C3/32;H01L21/00
主分类号
B24C3/32
代理机构
代理人
主权项
地址
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