| 摘要 |
PURPOSE:To improve the operation efficiency and productivity of a crystal growth furnace, by carrying out the cooling of the pulled single crystal outside of the growth furnace using a crystal cooling furnace placed movably above the growth furnace. CONSTITUTION:The cooling furnace 6 is placed upon the after-heater 5, and the growth of the single crystal 4 is carried out separating the bottom lid 9 of the cooling furnace 6 and the crystal supporting tool 18 from the pulling axis line. After the completion of growth, the cooling furnace 6 is heated with the heater to a temperature nearly equal to that in the after-heater 5. Then the grown single crystal is pulled in the cooling furnace 6, the furnace is pulled up and separated from the after-heater 5 and closed at its bottom with the bottom lid 9, the crystal supporting tool 18 is inserted in the seed rod 14, and the tool 18 is made to contact with the joint 16. The fixing bolt 18 is loosened, and the pulling axix 15 is extracted upward from the joint. The supporting stem 11 is turned to separate the whole cooling furnace 6 from the growth furnace, and the crystal is cooled in the cooling furnace at a side of the growing furnace by controlling the current to the heater of the cooling furnace 6. |
