发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To realize a low cost and highly reliable semiconductor device for wire junction by a method wherein, when a wire junction of the lead frames and the Ag globules is performed using Ag wires, the wire junction is performed in an active atmosphere, and at the same time, after a thermal pressure-welding was peformed, the heat oxidation of the Ag globules is prevented. CONSTITUTION:In active gas or reducing gas is made to jet from thje holes 6 of a lead frame retainer 4, and the thermal oxidation of Ag globules 8 provided on a semiconductor element 7 connected with lead frames 9 is prevented. Or, after the wire junction, whichis performed using Ag wires, a method, wherein generated oxides are removed by performing a thermal treatment in an inactive or reducing atmosphere or in a vacuum, can be also applied. According to this constitution, a highly reliable wire junction can be performed using Ag wires even through Au wires are not used for the wire junction.
申请公布号 JPS60177639(A) 申请公布日期 1985.09.11
申请号 JP19840032865 申请日期 1984.02.23
申请人 NIPPON DENKI KK 发明人 KAMIJIYOU ATSUSHI
分类号 H01L21/603;H01L21/60 主分类号 H01L21/603
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